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Electrostatic Charge Control Solutions
FOR SEMICONDUCTOR INDUSTRY
Static Charge in Semiconductor Manufacturing
Static charges are generated during semiconductor manufacturing, primarily due to contact and separation of dissimilar materials.
Static charges affect productivity and yield in three ways. Static charges attract electrostatically charged (ESA) airborne particles, causing potential yield losses on wafers and grids. Electrostatic discharge (ESD) of voltage causes instantaneous or latent defects on grids, wafers, or packaged chips. ESD can also create electromagnetic interference (EMI), triggering microprocessor lockups and robot malfunctions, leading to product line interruptions and costly tool downtime.
Ionization & Process Monitoring
Air ionization maintains cleanroom and product integrity by neutralizing statically charged particles in the air and on work surfaces. Our ionization products range from digital systems that manage and automate cleanroom ionization and EFEMs to dedicated ionizers inside tools that can withstand extreme temperatures, fit into tight spaces, or integrate into process gas lines to ionize air or nitrogen streams. Our Novx product line complements our sensor capabilities with closed-loop integration to monitor the production environment while controlling ionizer balance and performing automated decay testing. Our experienced worldwide Application Engineering team ensures the ionizer selection is optimized for your specific process applications. Simco-Ion has been recognized as a leader in innovative semiconductor manufacturing ionization and monitoring technology and products for over thirty years.
Electrostatic protection for every step of the process
Our portfolio of electrostatic control solutions addresses every stage of wafer manufacturing from tooling and room environment requirements to test, assembly and packaging applications.
Wafer manufacturing: In the tool
Within the small environment of the instrument and EFEM, the Model 5225 Digital AeroBar® Ionization System uses IonMonitor Software to regulate, control, and tune the ion output for continuous optimal performance. The state-of-the-art AeroBar MP Model 5635 meets ISO Class 1 standards for particles ≥10 nm, thus providing the cleanest ionization available for advanced wafer technologies.
Static control standards
Several standards have been developed as guidelines to control the costly effects of static electricity in manufacturing environments. Ionization has proven to be effective and necessary in implementing these standards.